德国BURKERT气体质量流量测量仪简介

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the user is able to switch between these two gases. This instrument communicates with master devices digitally,

 (-10 to +60°C with oxygen) Ambient temperature -10 to +50°C Accuracy ±0.8% o.R. ±0.3% F.S. 

(after 1 min. warm up time) Repeatability ±0.1% F.S. Response time (t95%) < 300 ms Materials 

当前流量将通过 RS 通讯输出。可针对两种不同的气体对型号 8703 进行校准，

用户可在两者之间进行转换。根据用户要求的不同，

质量流量测量仪用于在工艺技术领域直接测量气体通过量。

 no further A/D conversions needed. The MassFlowCommunicator software can be used for parameterisation and diagnosis.

Technical Data Nominal ? ow range1) (Qnominal)

紧凑型结构和数字通讯

? Direct flow measurement by  MEMS- Technology for nominal flow rates  from 10 mlN/min to 80 lN/min (N2) 

? High accuracy ? Short response time ? Compact design and digital communication

Mass ? ow meter are used in process technology for the direct measurement of the mass ? ow of gases. 

采用半导体传感器技术的直接流量测量装置，适合额定流量范围 20 mlN/min 至 80 lN/min (N2)

在体积流量测量仪中，还需要测量温度和压力或密度，

Body Housing Seals Aluminium or stainless steel Metal FKM, EPDM Port connection NPT 1/4, G 1/4, screw-in ? tting or sub-base, others on reques 

In case of volumetric ? ow meters, it is necessary to measure the temperature and the pressure or the density,

 because gases change their density or rather their volume depending on the pressure. 

因为气体的密度或体积会因压力的不同而发生变化。

 The digital mass ? ow meter type 8703 uses a sensor on silicon chip basis located directly in contact with the gas.  

Due to the fact that the sensor is directly in the bypass channel a very fast response time of the MFM is reached.  

The actual ? ow is given over RS485-communication. Type 8703 can optionally be calibrated for two different gases, 

与介质相接触接头的材料可确保装置能配合所有常见工艺气体运行。

 The measurement of the mass ? ow, on the other hand, is independent of the pressure and temperature.   

10 mlN/min 2) to 80 lN/min (N2), see table on p. 2 Turn-down ratio 1:50, higher turn-down ratio on request 

Operating gas Neutral, non-contaminated gases, on request Calibration gas Operating gas or air with conversion factor Max.

 operating pressure (Inlet pressure) 10 bar (145 psi) depending on the ori? ce of the valve Gas temperature -10 to +70°C

与之相反，质量流量的测量并不取决于压力和温度。

8703 型数字式质量流量测量仪具有一个以硅芯片为基础的传感器（参见 2 页的描述），

Electr. connection Plug D-Sub 9-pin Power supply 24V DC Voltage tolerance ±10% Residual ripple < 2% Power

 consumption 5 W Communication Digital via RS485 (half-duplex or fullduplex), 

RS422 Protection class IP40 Dimensions [mm] see drawings p. 5-6 Total weight ca. 500 g (aluminium body)

 Installation horizontal or vertical Light emitting diodes (default functions, other functions programmable) 

Indication for power, limit and error Binary Input (default, other functions programmable) Not assigned Binary Output 

 (default, other functions programmable) One relay-output for Limit (process value close to full scale value) Max. load: 25V, 1A, 25VA

反应快速

该传感器直接在气体流中进行测量。通过这种方式可以达到非常短的设备反应时间。

德国BURKERT气体质量流量测量仪简介